In the MEMS optical switch assembly, the collision is likely to happen between the optical fiber and the U-groove of the chip due to\nthe uncontrollable assembly errors. However, these errors can hardly be completely eliminated by the active control using high\nprecision sensors and actuators. It will cause the large acting force and part damage, which further leads to the assembly failure. To\nsolve this question, this paper presents a novel low-cost three-degree-of-freedom (three-DOF) passive flexure system to adaptively\neliminate the planar assembly errors. The flexure system adopts three parallel kinematic chains with a novel 3-RPR structure and\nhas a compact size with a diameter of 125mmand thickness of 12 mm. A novel eddy current damper with the structure of Halbach\narray permanent magnets (PMs) is utilized to suppress the adverse mechanical vibration of the assembly system from the\nbackground disturbances. Analytical models are established to analyze the kinematic, static, and dynamic performances of the\nsystem in detail. Finally, finite element analysis is adopted to verify the established models for optimum design.
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